Optimal electrode shape and size for shear mode thin film acoustic wave resonators

Xu, L. M.; Tang, B. B.; Hu, Y. T.; Fan, H.; Yang, J. S.
December 2009
Applied Physics Letters;12/7/2009, Vol. 95 Issue 23, p233501
Academic Journal
We study electrode shape and size for plates of hexagonal crystals or polarized ceramics with the sixfold axis or the poling direction parallel to the plate surfaces so that they can be excited into thickness-shear vibration by an electric field in the plate thickness direction. Electrode size and shape optimal in the sense that they satisfy the criterion of Bechmann’s number in every direction are determined.


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