AlN/ZnO/diamond structure combining isolated and surface acoustic waves

Elmazria, Omar; Zhgoon, Sergei; Le Brizoual, Laurent; Sarry, Frédéric; Tsimbal, Dmitry; Djouadi, Mohammed Abdou
December 2009
Applied Physics Letters;12/7/2009, Vol. 95 Issue 23, p233503
Academic Journal
In order to generate surface acoustic waves (SAW) and waveguiding layer acoustic waves (WLAW) simultaneously, a multilayer structure of AlN/ZnO/diamond has been proposed. This structure has been investigated theoretically (two-dimensional finite element method) and experimentally. The nature of the excited modes and their order were identified by modeling and confirmed experimentally by measuring the frequency response of the device in the air and in contact with the liquid. The demonstrated structure can be used to realize a packageless sensor or resonator, using the WLAW alone. A temperature compensated gas or liquid sensor can also be realized by combined usage of the SAW and the WLAW.


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