Role of doping accuracy for sub-0.13um technology

Adibi, Babak
January 2001
Solid State Technology;Jan2001, Vol. 44 Issue 1, p68
Trade Publication
Discusses the role of doping in transistor fabrication of semiconductors. Use of device TCAD software in the establishment of the relationship between device and equipment parameters; Importance of the accuracy of dopant placement for all implant steps.


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