Focused ion beam generated antimony nanowires for microscale pH sensors

Avdić, A.; Lugstein, A.; Schöndorfer, C.; Bertagnolli, E.
November 2009
Applied Physics Letters;11/30/2009, Vol. 95 Issue 22, p223106
Academic Journal
We demonstrate the formation of a complementary metal-oxide semiconductor compatible micro scale pH sensor with an antimony (Sb) nanowire network as the solid state pH electrode. The sensor is formed combining well known semiconductor processing techniques with a focused ion beam based approach inducing the self assembled formation of Sb nanowires in room temperature ambient without using any additional material source. The microscale pH sensor shows a highly linear relation in standardized pH buffer solutions with a sensitivity of 55.9 mV/pH and a very short response time of less than 8 s.


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