Electron accumulation at nonpolar and semipolar surfaces of wurtzite InN from generalized infrared ellipsometry

Darakchieva, V.; Schubert, M.; Hofmann, T.; Monemar, B.; Hsiao, Ching-Lien; Liu, Ting-Wei; Chen, Li-Chyong; Schaff, W. J.; Takagi, Y.; Nanishi, Y.
November 2009
Applied Physics Letters;11/16/2009, Vol. 95 Issue 20, p202103
Academic Journal
The free electron properties of nonpolar [formula]-oriented and semipolar [formula]-oriented wurtzite InN films are studied by generalized infrared ellipsometry (GIRSE). We demonstrate the sensitivity of GIRSE to the surface charge accumulation layer and find a distinct surface electron accumulation to occur at all surfaces. The obtained surface electron sheet densities are found to vary from 0.9×1013 to 2.3×1014 cm-2 depending on the surface orientation and bulk electron concentration. The upper limits of the surface electron mobility parameters of 417–644 cm2/V s are determined and discussed in the light of electron confinement at the surface.


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