Measurement of heat capacity and enthalpy of formation of nickel silicide using nanocalorimetry

Kummamuru, Ravi K.; De La Rama, Lito; Hu, Liang; Vaudin, Mark D.; Efremov, Mikhail Y.; Green, Martin L.; LaVan, David A.; Allen, Leslie H.
November 2009
Applied Physics Letters;11/2/2009, Vol. 95 Issue 18, p181911
Academic Journal
The total enthalpy of reaction and heat capacity to 850 °C were measured using differential scanning nanocalorimetry (nano-DSC) for the reaction of a nickel and silicon bilayer at heating rates up to 106 K/s. Exothermic dips in heat capacity attributed to nickel silicide formation were found along with indications of phase changes at 430 and 550 °C. The postreaction phases were identified using electron backscattered diffraction. Samples with a Ni:Si molar ratio of 1.2 heated to 850 °C were a mixture of orthorhombic NiSi and the θ-phase (hexagonal—Ni2Si); samples heated to 790 °C resulted in predominantly NiSi.


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