TITLE

Terahertz vacuum electronic circuits fabricated by UV lithographic molding and deep reactive ion etching

AUTHOR(S)
Shin, Young-Min; Barnett, Larry R.; Gamzina, Diana; Luhmann, Neville C.; Field, Mark; Borwick, Robert
PUB. DATE
November 2009
SOURCE
Applied Physics Letters;11/2/2009, Vol. 95 Issue 18, p181505
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The 0.22 THz vacuum electronic circuits fabricated by UV lithography molding and deep reactive ion etching processes are under investigation for submillimeter wave applications. Eigenmode transient simulations show that, accounting for realistic values of our currently achievable fabrication tolerances, the transmission, and dispersion properties of the operation modes of a TE-mode, staggered, double grating circuit are maintained within less than 1 dB and 2% deviation, respectively. Scanning electron microscopy and atomic force microscopy analyses of the fabricated circuit samples demonstrate that both of the microelectromechanical system fabrication approaches produce circuits with ±3–5 μm dimensional tolerance and ∼30 nm surface roughness.
ACCESSION #
45036524

 

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