TITLE

VOLATILE ORGANIC ACHIEVEMENTS

AUTHOR(S)
Miller, John D.; Gilliland, Tina; Buniovich, Grigori A.; Matros, Yurii Sh.
PUB. DATE
November 2009
SOURCE
Pollution Engineering;Nov2009, Vol. 41 Issue 11, p30
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
The article offers information on the introduction of silicon-resistant catalyst on regenerative thermal oxidizer (RTO) to control emission of volatile organic compounds (VOC) in the U.S. semiconductor industry. It cites that installation of catalyst mixes the catalytic oxidation with thermal efficiency of regenerative heat exchange which makes packing of hexamethyldisilazane (HMDS) resilient. Moreover, the industry must minimize HMDS and maintain highest operating efficiency.
ACCESSION #
44959933

 

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