Anomalous scaling during glancing angle deposition

Mukherjee, S.; Gall, D.
October 2009
Applied Physics Letters;10/26/2009, Vol. 95 Issue 17, p173106
Academic Journal
Metallic nanorods grown by glancing angle deposition at Ts=300–1123 K exhibit self-affine scaling, where the average rod width w increases with height h according to w∝hp. The growth exponent p for the investigated metals (Ta, Nb, and Cr) varies with temperature and material but collapses onto a single curve when plotted against the homologous temperature θ=Ts/Tm. It decreases from p=0.5 at θ=0 to 0.39 at θ=0.22, consistent with reported theoretical predictions, but exhibits a transition to an anomalous value of p=0.7 at θ=0.26, followed by a decrease to 0.33 at θ=0.41. The cause for the anomalous scaling at 0.24≤θ≤0.34 is unknown but may be due to a gradual transition from two-dimensional to three-dimensional surface island growth.


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