TITLE

CH spectroscopy for carbon chemical erosion analysis in high density low temperature hydrogen plasma

AUTHOR(S)
Westerhout, J.; Lopes Cardozo, N. J.; Rapp, J.; van Rooij, G. J.
PUB. DATE
October 2009
SOURCE
Applied Physics Letters;10/12/2009, Vol. 95 Issue 15, p151501
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The CH A-X molecular band is measured upon seeding the hydrogen plasma in the linear plasma generator Pilot-PSI [electron temperature Te=0.1–2.5 eV and electron density ne=(0.5–5)×1020 m-3] with methane. Calculated inverse photon efficiencies for these conditions range from 3 up to >106 due to a steeply decreasing electron excitation cross section. The experiments contradict the calculations and show a constant effective inverse photon efficiency of ∼100 for Te<1 eV. The discrepancy is explained as the CH A level is populated through dissociative recombination of the molecular ions formed by charge exchange. Collisional de-excitation is observed for ne>5×1020 m-3 and 0.1 eV
ACCESSION #
44665234

 

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