Local charge transport in nanoscale amorphous and crystalline regions of high-k (Zr02)0.8(Al2O3)0.2 thin films

Martin, Dominik; Grube, Matthias; Weber, Walter M.; Rüstig, Jürgen; Bierwagen, Oliver; Geelhaar, Lutz; Riechert, Henning
October 2009
Applied Physics Letters;10/5/2009, Vol. 95 Issue 14, p142906
Academic Journal
The charge transport in (Zr02)0.8(Al2O3)0.2 thin films consisting of nanoscale crystallites in an amorphous matrix were investigated by conductive atomic force microscopy. Local current-voltage curves were obtained either from multiple current images for different biases or by ramping the tip bias at a specific location. Comparison of both approaches for amorphous matrix sites implies that they are equivalent. Current-voltage curves for crystallite and amorphous sites are different, but repeated voltage ramps at amorphous sites yield curves as obtained at pristine crystallites. This suggests charge transport through leakage paths along defects at grain boundaries and along stress-induced defects at amorphous sites.


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