TITLE

The Importance or Lens Cleaning After Spin Coating, and Prior to AR

AUTHOR(S)
Kim, George
PUB. DATE
September 2009
SOURCE
LabTalk;Sep/Oct2009, Vol. 37 Issue 19C, p38
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
The article presents a discussion on lens cleaning. The author suggests that better than all others, the means to cleaning a lens is to use de-ionized water, a cleaning agent, and ultra-sonics. It is inferred that this procedure has a significance following a spin coating. The author views that lens cleaning before anti-reflective (AR) processing is possibly important to a greater extent than cleaning before spin coating.
ACCESSION #
44456794

 

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