A superlens for the deep ultraviolet

Schilling, Alina; Schilling, Joerg; Reinhardt, Carsten; Chichkov, Boris
September 2009
Applied Physics Letters;9/21/2009, Vol. 95 Issue 12, p121909
Academic Journal
A superlens based on a single aluminum layer operating at deep ultraviolet (UV) wavelengths is investigated both, theoretically and experimentally. Using a wavelength of 157 nm double slits with a center-to-center separation of only 70 nm were experimentally resolved and simulations indicate a possible resolution down to 29 nm with experimentally feasible arrangements. The results demonstrate the significance of aluminum as plasmonic material for the deep UV.


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