A high-Q hybrid acoustic mode in thin film ZnO solidly mounted resonators

Wathen, Adam D.; Munir, Farasat; Hunt, William D.
September 2009
Applied Physics Letters;9/21/2009, Vol. 95 Issue 12, p123509
Academic Journal
An extremely high-Q hybrid acoustic mode was observed in laterally excited c-axis ZnO solidly mounted resonators. The acoustic velocity through the thickness is approximately 3500 m/s which is inconsistent with both the thickness shear and longitudinal modes (2800 and 6400 m/s, respectively). In nearly 300 devices tested, the mode exhibits an average Q of 1957 with the highest observed being 34 000. With small device sizes relative to excitation wavelength and resonant frequency invariant with electrode geometry, we attribute this resonance to purely acoustic effects and not electromagnetic radiative effects. These devices have great potential for high frequency filters and sensing applications.


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