Diagnostics of inductively coupled chlorine plasmas: Measurements of the neutral gas temperature

Donnelly, V. M.; Donnelly, V.M.; Malyshev, M. V.; Malyshev, M.V.
October 2000
Applied Physics Letters;10/16/2000, Vol. 77 Issue 16
Academic Journal
We report measurements of the bulk, neutral gas temperature in a chlorine transformer-coupled plasma. A trace amount (2%-5%) of N[sub 2] was added to the discharge and the rotational temperature of the C[sup 3]Π[sub u] state was determined from the C[sup 3]Π[sub u]→B[sup 3]Π[sub g] emission in the ultraviolet. This temperature has been shown by others to be equal to the rotational temperature of ground-state N[sub 2], which is the thermally equilibrated (translational and rotational) gas temperature (T[sub g]). The gas temperature 3 cm above the wafer is equal to, or only slightly above the wall temperature (300 K) throughout the low-power, capacitively coupled regime (<60 W, 0.024 W/cm3). Between the lowest (130 W, 0.053 W/cm3) and highest (900 W, 0.36 W/cm3) inductively coupled mode powers investigated, T[sub g] increases sublinearly with power (and electron density). The high-power (900 W) T[sub g] increases with increasing pressure (650, 750, 900, and 1250 K at 2, 5, 10, and 20 mTorr, respectively). Mechanisms of neutral gas heating are discussed. The energy released in dissociation of Cl[sub 2] appears to be the dominant heating mechanism. © 2000 American Institute of Physics.


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