Molecular beam epitaxial growth of atomically smooth scandium nitride films

Al-Brithen, Hamad; Smith, Arthur R.
October 2000
Applied Physics Letters;10/16/2000, Vol. 77 Issue 16
Academic Journal
High quality scandium nitride films have been grown on magnesium oxide (001) substrates by molecular beam epitaxy using a rf plasma source for nitrogen. Both reflection high energy electron diffraction and x-ray diffraction confirm that these films have (001)-orientation. Atomic force microscopy reveals a surface morphology consisting of large plateaus and pyramids. The plateaus are found to be atomically smooth and have a 1x1 surface structure, as revealed by in situ scanning tunneling microscopy. © 2000 American Institute of Physics.


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