Degradation of ferroelectric Pb(Zr, Ti)O[sub 3] under reducing conditions

Shimakawa, Y.; Kubo, Y.
October 2000
Applied Physics Letters;10/16/2000, Vol. 77 Issue 16
Academic Journal
The degradation mechanisms of Pb(Zr, Ti)O[sub 3] (PZT) under reducing conditions were investigated. Although no apparent changes were seen from the results of thermogravimetric and x-ray diffraction measurements after H[sub 2] annealing at typical process temperatures, the PZT material had changed: The sample appearance changed from white to black. A small amount of PZT (less than 0.3% even after 4% H[sub 2] annealing at 550 °C) decomposed into Pb in the reducing atmosphere. This, however, was too little to cause all of the change in the sample appearance. Systematic changes in the lattice constants and the black color of the sample strongly suggest that oxygen defects were introduced into the PZT during H[sub 2] annealing. Oxygen defects would produce a donor level within the PZT band gap, which would account for the change in color, and would increase leakage current in capacitors. We have also found that PbZrO[sub 3] decomposed through oxygen dissociation more easily than PbTiO[sub 3]. Oxygen atoms in PbZrO[sub 3] are weakly bonded to Zr compared to Ti-O bonds in PbTiO[sub 3] due to a significant antibonding component in the hybridized orbitals. © 2000 American Institute of Physics.


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