Scanning nanolithography using a material-filled nanopipette

Hong, Mun-Heon; Mun-Heon Hong; Kim, Ki Hyun; Ki Hyun Kim; Bae, Joonho; Joonho Bae; Jhe, Wonho; Wonho Jhe
October 2000
Applied Physics Letters;10/16/2000, Vol. 77 Issue 16
Academic Journal
A scanning nanolithography is demonstrated by employing near-field optical microscopy with a pulled micropipette which is used for material transport as well as distance regulation. Delivering the photoresist through the small aperture (300 nm diameter) of the pulled pipette with the shear-force distance control, we have fabricated nanometric dots (300 nm diameter) on the gold-sputtered substrate. This scheme may be also useful in nanometric control of chemical reaction and repair of nanometric structures. © 2000 American Institute of Physics.


Related Articles

  • Characteristics of scanning-probe lithography with a current-controlled exposure system. Ishibashi, Masayoshi; Heike, Seiji; Kajiyama, Hiroshi; Wada, Yasuo; Hashizume, Tomihiro // Applied Physics Letters;3/30/1998, Vol. 72 Issue 13 

    Characteristics of atomic force microscopy lithography using a current-controlled exposure feedback system are investigated by fabricating line-and-space patterns on the negative-type electron beam resist RD2100N. We find that the cross-sectional shape of the developed resist pattern depends on...

  • Nanometer-scale patterning and individual current-controlled lithography using multiple scanning... Wilder, Kathryn; Soh, Hyongsok T.; Atalar, Abdullah; Quate, Calvin F. // Review of Scientific Instruments;Jun99, Vol. 70 Issue 6, p2822 

    Addresses the speed constraints for reliable patterning of organic resists in scanning probe lithography, which can be used to pattern nanometer-scale features on a variety of substrates. High speed patterning with a single tip; Current-controlled lithography with two tips.

  • Near-field direct-write ultraviolet lithography and shear force microscopic studies of the.... Smolyaninov, Igor I.; Mazzoni, David L. // Applied Physics Letters;12/25/1995, Vol. 67 Issue 26, p3859 

    Presents results of the direct-write ultraviolet lithography and shear force microscopic studies of the lithographic process. Use of near field scanning optical microscopy of uncoated fiber tip and photoresist layer; Spatial resolution on a krypton fluoride excimer laser with uncoated fiber...

  • Scanning probe with an integrated diamond heater element for nanolithography. Bae, Joon Hyung; Ono, Takahito; Esashi, Masayoshi // Applied Physics Letters;2/3/2003, Vol. 82 Issue 5, p814 

    This letter reports the microfabrication, evaluation, and application of a boron-doped diamond microprobe with an integrated resistive heater element. The diamond heater with a pyramidal tip, which is formed at the end of two diamond beams, can be electrically heated by a flowing current. The...

  • Multifunctional, micropipette based force cantilevers for scanned probe microscopy. Lieberman, Klony; Lewis, Aaron // Applied Physics Letters;8/1/1994, Vol. 65 Issue 5, p648 

    Demonstrates quartz micropipette and optical fiber based structures with applications for scanned probe microscopy. Production of probes by drawing, cantilevering and polishing; Functional comparison between the probes and other scanning tips; Integration of near-field scanning optical...

  • Placement of conjugated oligomers in an alkanethiol matrix by scanned probe microscope lithography. Chen, J.; Reed, M.A.; Asplund, C.L.; Cassell, A.M.; Myrick, M.L.; Rawlett, A.M.; Tour, J.M.; Van Patten, P.G. // Applied Physics Letters;8/2/1999, Vol. 75 Issue 5, p624 

    Reports on the in situ replacement of conjugated molecules in an insulating matrix by scanned probe microscope lithography. Performance of high-yield, programmable patterning of a self-assembled monolayer of dodecanethiol by applying voltage pulses from a scanning tunneling microscope;...

  • Kinetics of scanned probe oxidation: Space-charge limited growth. Dubois, Emmanuel; Bubendorff, Jean-Luc // Journal of Applied Physics;6/1/2000, Vol. 87 Issue 11, p8148 

    Presents a study which proposed an enhanced oxidation model for scanning probe microscope (SPM) nanolithography that reproduces the power-of-time law for anodic oxidation. Characterization of SPM anodic oxide; Conclusion.

  • Sensors for scanning probe microscopy. Kassing, R.; Rangelow, I.W.; Oesterschulze, E.; Stuke, M. // Applied Physics A: Materials Science & Processing;2003, Vol. 76 Issue 6, p907 

    Scanning probe microscopy is still suffering from reproducible fabrication of the corresponding sensors for mechanical, electrical, optical, thermal and chemical material characterisation with highest lateral and/or time resolution. For batch-fabrication techniques lithographic, dry etching and...

  • Nano-Writing with Bio-Inks. Boguslavsky, Julia // Bio-IT World;Mar2004, Vol. 3 Issue 3, p86 

    Provides information on dip pen nanolithography (DPN), a direct-write patterning technique based on scanning probe technology. Uses of DPN; Benefits of DPN to researchers; Significance of DPN in patterning biological structures. INSET: The Upside of Downsizing.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics