TITLE

Scanning nanolithography using a material-filled nanopipette

AUTHOR(S)
Hong, Mun-Heon; Mun-Heon Hong; Kim, Ki Hyun; Ki Hyun Kim; Bae, Joonho; Joonho Bae; Jhe, Wonho; Wonho Jhe
PUB. DATE
October 2000
SOURCE
Applied Physics Letters;10/16/2000, Vol. 77 Issue 16
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A scanning nanolithography is demonstrated by employing near-field optical microscopy with a pulled micropipette which is used for material transport as well as distance regulation. Delivering the photoresist through the small aperture (300 nm diameter) of the pulled pipette with the shear-force distance control, we have fabricated nanometric dots (300 nm diameter) on the gold-sputtered substrate. This scheme may be also useful in nanometric control of chemical reaction and repair of nanometric structures. © 2000 American Institute of Physics.
ACCESSION #
4433206

 

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