Experimental measurement of the total energy losses in a low pressure inductively coupled argon plasma

Young-Kwang Lee; Min-Hyong Lee; Chin-Wook Chung
September 2009
Applied Physics Letters;9/14/2009, Vol. 95 Issue 11, p111501
Academic Journal
Total energy losses per electron-ion pair lost ([variant_greek_epsilon]T) were measured experimentally in a low pressure inductively coupled argon plasma. A floating probe working at very low bias voltage (∼1 V) was used to obtain the electron temperatures and plasma densities at the plasma-sheath boundary. [variant_greek_epsilon]T was found from a power balance equation between the absorbed power and dissipated power by electrons and ions. At 10 mTorr, the measurement shows that the measured [variant_greek_epsilon]T (∼100 V) gradually decreased with absorbed power, and this indicates that the ionization efficiency enhances by multistep ionizations. These [variant_greek_epsilon]T are consistent with the theoretical results.


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