TITLE

Role of low-frequency power in dual-frequency capacitive discharges

AUTHOR(S)
Ahn, S. K.; Chang, H. Y.
PUB. DATE
September 2009
SOURCE
Applied Physics Letters;9/14/2009, Vol. 95 Issue 11, p111502
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Changes in plasma characteristics depending on low-frequency power in dual-frequency capacitive discharges were found from the measurement of electrical characteristics and electron energy probability functions. It is shown that as the low-frequency (2 MHz) power increases for the fixed high-frequency (27.12 MHz) current, the ion bombardment energy, and the ion flux onto the electrode increase simultaneously. It is also shown that the coupling between the low-frequency power and the ion flux originates from change in electron heating mechanisms when varying the low-frequency power. Depending on the discharge pressure, changes in the collisional electron heating in the bulk plasma and participation of the secondary electron emission in the ionization process are observed.
ACCESSION #
44292311

 

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