Latency effects and periodic structures in light-induced frustrated etching of Fe:doped LiNbO[sub 3]

Boyland, Alexander J.; Mailis, Sakellaris; Amilis, Sakellaris; Barry, Ian E.; Eason, Robert W.; Kaczmarek, Malgosia
October 2000
Applied Physics Letters;10/30/2000, Vol. 77 Issue 18
Academic Journal
Single crystals of z-cut 0.05% Fe:doped lithium niobate (Fe:LiNbO[sub 3]), have been etched in a mixture of HF and HNO[sub 3] acids, under simultaneous illumination from a ∼100 mW 488 nm wavelength Ar ion laser light source, focused to power densities of ∼50 W cm-2 at the crystal surface exposed to the etchant. Etching is partially inhibited in illuminated regions, and the degree of inhibition shows a systematic latency: sites illuminated early in the etch run resist further etching even after the light is removed. Etched structures additionally exhibit regular periodic features of ∼0.5 μm scale length. Details of these structures are shown, and the latent etching effect is discussed. © 2000 American Institute of Physics.


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