TITLE

Ion implantation and energy loss effect during high-voltage pulsed glow discharge in a tube

AUTHOR(S)
Langping Wang; Yang Lu; Xiaofeng Wang; Zhiwen Xie; Lei Huang; Yanhong Wei
PUB. DATE
September 2009
SOURCE
Applied Physics Letters;9/7/2009, Vol. 95 Issue 10, p101501
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Plasma parameters of high-voltage pulsed glow discharge in a tube were studied using a static probe and optical emission spectrometry. Experiment results show that two kinds of plasma can be obtained in the tube and a virtual anode can be formed at the center of the tube. The potential of the virtual anode is about 20%–30% of the applied bias. The Auger electron spectroscopy depth profile shows that the peak depth of the implanted ions in the tube is about 70%–80% of that outside the tube, owing to the virtual anode.
ACCESSION #
44150702

 

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