Formation and incorporation of SiF4 molecules in F-implanted preamorphized Si

De Salvador, D.; Bisognin, G.; Napolitani, E.; Mastromatteo, M.; Baggio, N.; Carnera, A.; Boscherini, F.; Impellizzeri, G.; Mirabella, S.; Boninelli, S.; Priolo, F.; Cristiano, F.
September 2009
Applied Physics Letters;9/7/2009, Vol. 95 Issue 10, p101908
Academic Journal
The local structure of fluorine incorporated in crystalline silicon following solid phase epitaxial regrowth was investigated by means of x-ray absorption spectroscopy at the F K-edge. We clearly demonstrate that most F is found in SiF4 molecules in the crystalline matrix. A kinetic pathway, which explains our observation and which is also able to rationalize previous results in a common and coherent framework, is proposed.


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