TITLE

Negative ion formation in the scattering of CF[sub 3][sup +] from graphite

AUTHOR(S)
Gleeson, M. A.; Gleeson, M.A.; Kropholler, M.; Kleyn, A. W.; Kleyn, A.W.
PUB. DATE
August 2000
SOURCE
Applied Physics Letters;8/21/2000, Vol. 77 Issue 8
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The scattering of CF[sub 3][sup +] from highly oriented pyrolytic graphite results in the formation of CF[sub 3][sup -]. Comparison is made with CF[sub 3][sup +] scattering from a metal and from an insulator surface, which do not yield negative molecular ions. The outcome of the charge transfer processes that occur as CF[sub 3][sup +] approaches a surface is critically dependent on the electronic properties of that surface. The ability to produce a stable negative ion close to a surface may be an important factor in the etching efficiency of the CF[sub 3] molecule. © 2000 American Institute of Physics.
ACCESSION #
4414517

 

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