TITLE

Dielectric function of V[sub 2]O[sub 5] nanocrystalline films by spectroscopic ellipsometry: Characterization of microstructure

AUTHOR(S)
Losurdo, Maria; Bruno, Giovanni; Barreca, Davide; Tondello, Eugenio
PUB. DATE
August 2000
SOURCE
Applied Physics Letters;8/21/2000, Vol. 77 Issue 8
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Spectroscopic ellipsometry over the photon energy 1.5-5.0 eV is used to derive the dielectric function of V[sub 2]O[sub 5] nanocrystalline films deposited by plasma-enhanced chemical vapor deposition. The dispersion in the optical response is described by a combination of Lorentzian oscillators. The results are obtained from a microstructure-dependent model, which considers the anisotropy of the V[sub 2]O[sub 5] crystallites into the bulk film, as well as the presence of interface and surface roughness layers. The variation of the V[sub 2]O[sub 5] thin-film dielectric function upon film crystallinity, going from pure nanocrystalline to amorphous material, is also investigated. © 2000 American Institute of Physics.
ACCESSION #
4414506

 

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