Observation of a 6x6 superstructure on 6H-SiC (0001) by reflection high energy electron diffraction

Xie, Xian Ning; Xian Ning Xie; Loh, Kian Ping; Kian Ping Loh
November 2000
Applied Physics Letters;11/20/2000, Vol. 77 Issue 21
Academic Journal
A 6x6 reconstruction consisting of a silicon-rich phase has been observed on 6H-SiC (0001) after annealing a silicon-enriched 3x3 6H-SiC (0001) surface at 900 °C. Our results show that the 6x6 reconstruction obtained is a long-range reconstruction and not a psuedoperiodic structure due to incommensurately adsorbed graphite honeycombs as suggested previously. We propose that the 6x6 structure arises from the absence of consecutive tetrahedral clusters in a tetrahedral cluster array with 3x3 periodicity. Annealing the 6x6 structure further at 1200 °C results in a carbon-rich 6&sqrt;3x6&sqrt;3R30 structure. © 2000 American Institute of Physics.


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