Improved fabrication approach for carbon nanotube probe devices

Stevens, R.; Nguyen, C.; Cassell, A.; Delzeit, L.; Meyyappan, M.; Han, Jie
November 2000
Applied Physics Letters;11/20/2000, Vol. 77 Issue 21
Academic Journal
An improved process is developed for simple and efficient fabrication of carbon nanotube probe devices. This process requires only two steps to make nanotube probes. First a nanotube cartridge is created using chemical vapor deposition, then the nanotubes are transferred from the cartridge to a device using an electric field. Multiwall nanotube probes are made into different device geometries in this approach. Their applications are illustrated by atomic force microscopy imaging of the surface of a terrestrial rock granule selected to simulate the morphology and consistency of a grain of Mars dust and nanolithography on a silicon substrate.


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