Micro-optomechanical sensor for optical connection in the near field

Belier, B.; Santoso, A.; Bonnafe, J.; Nicu, L.; Temple-Boyer, P.; Bergaud, C.
September 2000
Applied Physics Letters;9/18/2000, Vol. 77 Issue 12
Academic Journal
A micro-optomechanical sensor has been used to collect and carry optical information at the nanometer scale. This simple device consists of a SiN[sub x] microfabricated cantilever used simultaneously as an atomic-force microscope (AFM) probe and optical waveguide. When approaching the micro-optical cantilever close to the surface, the tip converts evanescent waves into radiative waves that propagate within the cantilever over long distances. Since the device is also employed as an AFM probe, mechanical contact is fully controlled as the tip approaches the surface, thus avoiding any crash. This sensor has been used to collect optical information from an optical fiber in the near field. © 2000 American Institute of Physics.


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