Influence of electrode-size effects on plasma sheath expansion

Uhm, Han S.; Kim, Gon H.; Kim, Young W.; Kim, Gun. W.; Kim, Gun W.; Han, Seung H.; Hong, Mun P.
September 2000
Applied Physics Letters;9/18/2000, Vol. 77 Issue 12
Academic Journal
Influence of the electrode-size effects on plasma sheath expansion is investigated for a negative voltage at the cathode with maximum amplitude of V[sub 0], assuming that the cathode is a thin, flat, conducting, circular disk of radius R. It is shown that propagation of the sheath front is proportional to the one-third power of the combination, 2V[sub 0]R/π. Experimental measurements have been carried out to verify theoretical predictions. The experimental data agree remarkably well with theoretical results in every aspect. © 2000 American Institute of Physics.


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