Characterizing mechanical resonators by means of a scanning acoustic force microscope

Sthal, F.; Bourquin, R.
September 2000
Applied Physics Letters;9/18/2000, Vol. 77 Issue 12
Academic Journal
A method of characterizing resonators is presented. This method is based on scanning acoustic force microscopy. Data on the topography and the vibration amplitude of the resonator are obtained simultaneously, by means of atomic force interaction. The normal component of the surface vibration of the resonator is evaluated. A tuning fork resonator and a 10 MHz SC-cut Boítier a Vieillissement Amélioré quartz crystal resonator with adherent electrodes are studied. This analysis allows the cartography of the local characteristics of the resonator material to be made. © 2000 American Institute of Physics.


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