Surface morphology of ion-beam-irradiated rutile single crystals

Ishimaru, Manabu; Hirotsu, Yoshihiko; Li, Fuxin; Fuxin Li; Sickafus, Kurt E.
December 2000
Applied Physics Letters;12/18/2000, Vol. 77 Issue 25
Academic Journal
Ion-beam-induced structural changes in rutile (TiO[sub 2]) have been examined in detail using transmission electron microscopy (TEM). Single crystals of rutile with (100) orientation were irradiated with 360 keV Xe ions at room temperature to a fluence of 4x10[sup 15]/cm[sup 2]. In addition to a buried damage layer induced by projectile ions, a damage layer was formed near the surface (thickness about 10 nm). Nanobeam electron diffraction measurements and high-resolution TEM observations revealed that the surface damage layer consists of rutile crystallites with different orientations compared to the original single crystal. We discuss damage recovery processes in ion irradiated rutile within the context of our results as well as previous observations. © 2000 American Institute of Physics.


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