Highly efficient unibond silicon-on-insulator blazed grating couplers

Ang, T. W.; Ang, T.W.; Reed, G. T.; Reed, G.T.; Vonsovici, A.; Evans, A. G. R.; Evans, A.G.R.; Routley, P. R.; Routley, P.R.; Josey, M. R.; Josey, M.R.
December 2000
Applied Physics Letters;12/18/2000, Vol. 77 Issue 25
Academic Journal
In this letter, we report, design and fabrication of good asymmetrical Si-blazed gratings with a pitch of 383 nm, fabricated in unibond silicon-on-insulator using angled ion-beam etching. An output efficiency of 84% was achieved. The devices allow efficient coupling to/from small waveguides, of the order of 1 μm in height. © 2000 American Institute of Physics.


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