Piezoelectric properties and poling effect of Pb(Zr, Ti)O[sub 3] thick films prepared for microactuators by aerosol deposition

Akedo, J.; Lebedev, M.
September 2000
Applied Physics Letters;9/11/2000, Vol. 77 Issue 11
Academic Journal
Crack-free [Pb(Zr[sub 0.52], Ti[sub 0.48])O[sub 3]] (PZT) films with more than 10 μm thickness as the piezoelectric material, were formed on stainless-steel (SUS304) and Pt/Ti/SiO[sub 2]/Si substrates by aerosol deposition and then annealed at 600 °C in air. The deposition rate was 20 μm/min in an area of 5x5 mm[sup 2]. To estimate the piezoelectric and mechanical properties of PZT films, a unimorph structured PZT and a free-standing cantilever were fabricated. The Young's modulus (Y[sub 11]) of the PZT film was 80 GPa. Poling at 40 kV/cm, 250 °C for 20 min increased the properties by a factor of 4.0-5.5, resulting in the piezoelectric coefficient (-d[sub 31]) varying from 80 to 180 pm/V. © 2000 American Institute of Physics.


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