Near-infrared Yablonovite-like photonic crystals by focused-ion-beam etching of macroporous silicon

Chelnokov, A.; Cheinokov, A.; Wang, K.; Rowson, S.; Garoche, P.; Lourtioz, J.-M.
November 2000
Applied Physics Letters;11/6/2000, Vol. 77 Issue 19
Academic Journal
We report on the fabrication of three-dimensional (3D) Yablonovite-like photonic crystals by focused-ion-beam (FIB) etching of macroporous silicon. Crystals containing up to 25x25x5 lattice cells are fabricated with a submicronic period of ∼0.75 μm. Photonic band gaps at wavelengths close to 3 μm are demonstrated from reflection measurements and confirmed by numerical calculations. The combination of plasma or chemical etching with FIB micromachining appears to be promising for the fabrication of a large variety of multiple-period 3D photonic crystals at optical wavelengths. © 2000 American Institute of Physics.


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