Thickness dependence of stress in lead titanate thin films deposited on Pt-coated Si

Fu, Desheng; Desheng Fu; Ogawa, Takeshi; Suzuki, Hisao; Ishikawa, Kenji
September 2000
Applied Physics Letters;9/4/2000, Vol. 77 Issue 10
Academic Journal
Thickness dependence of the soft mode E(1TO) of tetraganol lead titanate thin film, deposited on Pt-coated Si by a chemical solution deposition, was determined with Raman scattering measurements. A downshift of the soft mode was attributed to the residual stress in the thin film, which was estimated in the range of 1.3-2.6 GPa, corresponding to film thickness of 400-50 nm. The variation of the clamped dielectric constants determined by observed mode frequencies was found to agree with the prediction of stress dependence of dielectric constants by Devonshire theory. © 2000 American Institute of Physics.


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