Near-field fluorescence imaging with 32 nm resolution based on microfabricated cantilevered probes

Eckert, Rolf; Freyland, J. Moritz; Gersen, Henkjan; Heinzelmann, Harry; Schu¨rmann, Gregor; Noell, Wilfried; Staufer, Urs; de Rooij, Nico F.
December 2000
Applied Physics Letters;12/4/2000, Vol. 77 Issue 23
Academic Journal
High-resolution near-field optical imaging with microfabricated probes is demonstrated. The probes are made from solid quartz tips fabricated at the end of silicon cantilevers and covered with a 60-nm-thick aluminum film. Transmission electron micrographs indicate a continuous aluminum layer at the tip apex. A specially designed instrument combines the advantages of near-field optical and beam-deflection force microscopy. Near-field optical data of latex bead projection patterns in transmission and of single fluorophores have been obtained in constant-height imaging mode. An artifact-free optical resolution of 31.7±3.6 nm has been deduced from full width at half maximum values of single molecule images. © 2000 American Institute of Physics.


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