Short lifetime photoluminescence of amorphous-SiNx films

Yamaguchi, Kenji; Mizushima, Kazuki; Sassa, Koichi
December 2000
Applied Physics Letters;12/4/2000, Vol. 77 Issue 23
Academic Journal
We observed photoluminescence (PL) of amorphous-SiNx films which showed a short radiative lifetime of about 1 ns. The spectrum form is Gaussian centered at around 2.2 eV. The samples were prepared by low-pressure chemical vapor deposition with SiH[sub 2]Cl[sub 2] and NH[sub 3] gases. We propose an electron-phonon coupling model for the PL, assuming that the coupling phonon is Si-H or N-H vibrational mode and the bond length changes over 0.1 Å at an excited state due to the strong interaction. © 2000 American Institute of Physics.


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