Imaging of acoustic fields in bulk acoustic-wave thin-film resonators

Safar, H.; Kleiman, R. N.; Barber, B. P.; Gammel, P. L.; Pastalan, J.; Huggins, H.; Fetter, L.; Miller, R.
July 2000
Applied Physics Letters;7/3/2000, Vol. 77 Issue 1
Academic Journal
By using an atomic-force-microscope-based technique, we image the vibration of high-frequency, bulk-mode, thin-film resonators. Our experimental technique is capable of monitoring the vibration of these devices over a broad frequency range, from 1 MHz to beyond 10 GHz, allowing us to obtain quantitative measurements of the piezoelectric properties of thin-film materials in that frequency range. This technique allows us to map the complex vibration modes of a new generation of high-frequency bulk piezoelectric resonators, revealing the presence of vibration patterns of very different characteristic lengths. © 2000 American Institute of Physics.


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