Near-field infrared imaging with a microfabricated solid immersion lens

Fletcher, D. A.; Fletcher, D.A.; Crozier, K. B.; Crozier, K.B.; Quate, C. F.; Quate, C.F.; Kino, G. S.; Kino, G.S.; Goodson, K. E.; Goodson, K.E.; Simanovskii, D.; Palanker, D. V.; Palanker, D.V.
October 2000
Applied Physics Letters;10/2/2000, Vol. 77 Issue 14
Academic Journal
We report imaging in the infrared with a microfabricated solid immersion lens. The integrated 15-μm-diameter lens and cantilever are fabricated from single-crystal silicon and scanned in contact with a sample to obtain an image. We demonstrate a focused spot size of λ/5 and an effective numerical aperture of 2.5 with λ=9.3 μm light. The total power transmitted through the lens is a factor of 10[sup 3] greater than through a metal aperture giving the same spatial resolution. Two 1.0 μm holes in a metal film separated by 3.0 μm are imaged with the solid immersion lens in transmission and shown to be resolved. © 2000 American Institute of Physics.


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