Extended frequency range dielectric measurements of thin films

Mopsik, Frederick I.
June 2000
Review of Scientific Instruments;Jun2000, Vol. 71 Issue 6
Academic Journal
A method is described to measure the dielectric constant and loss of thin films. It employs a sample holder based on precision 50 Ω air line and can be used from audio frequencies to 1 GHz with a single sample. It is shown to maximize the precision available from commercial instrumentation with minimal data correction. This is confirmed by regions in which the different instruments overlap their frequency coverage.


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