TITLE

Depth-profiling of elastic inhomogeneities in transparent nanoporous low-k materials by picosecond ultrasonic interferometry

AUTHOR(S)
Mechri, C.; Ruello, P.; Breteau, J. M.; Baklanov, M. R.; Verdonck, P.; Gusev, V.
PUB. DATE
August 2009
SOURCE
Applied Physics Letters;8/31/2009, Vol. 95 Issue 9, p091907
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We achieve depth-profiling of the elasticity of a thin transparent film of a nanoporous low-k material using picosecond acoustic interferometry. The variation in the material properties with depth is extracted from time-resolved femtosecond optical reflectivity measurements. More than 40% of the variation in the longitudinal elastic modulus between the front and the back surfaces of an 800 nm thick nanoporous layer is mapped with a 40 nm spatial resolution. We attribute this variation to the spatially inhomogeneous UV curing of the film during fabrication.
ACCESSION #
44066588

 

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