Interdiffusion and crystallization in HfO2/Al2O3 superlattices

Adelmann, C.; Kesters, J.; Opsomer, K.; Detavernier, C.; Kittl, J. A.; Van Elshocht, S.
August 2009
Applied Physics Letters;8/31/2009, Vol. 95 Issue 9, p091911
Academic Journal
The interplay of interdiffusion and crystallization in HfO2/Al2O3 superlattices during spike annealing at 1050 °C was studied using x-ray reflectivity and x-ray diffraction. A transition in thermal stability was found as a function of HfO2 thickness between 2.3 and 3.2 nm. This transition is due to a crossover of HfO2 crystallization and amorphous HfO2/Al2O3 interdiffusion kinetics. For thin HfO2, amorphous HfO2 and Al2O3 interdiffuse and subsequently crystallize as HfAlOx into a cubic-HfO2-like phase. For thicker HfO2, HfO2 layers crystallize individually into the monoclinic phase. As a consequence, interdiffusion between HfO2 and Al2O3 is suppressed because of the immiscibility of Al2O3 in monoclinic HfO2.


Related Articles

  • Doing double-crystal diffraction experiments with a conventional four-circle diffractometer. Chao, W. K.; Gao, E. Z.; Wong, H. K. // Review of Scientific Instruments;Sep93, Vol. 64 Issue 9, p2558 

    A simple attachment has been built to convert a conventional four-circle diffractometer to a double-crystal diffractometer. This modification allows us to do high-resolution structural studies at high/low temperatures.

  • A structural study of twinning in CdTe grown on GaAs (311). Berndt, P. R.; Neethling, J. H.; Zandbergen, H. W. // South African Journal of Science;May/Jun2005, Vol. 101 Issue 5/6, preceding p292 

    We have investigated the growth of CdTe on GaAs (311)A and B structures by metalorganic vapour phase epitaxy. Growth on (311)A substrates typically enhanced twinning, whereas that on (311)B substrates retarded twin formation. Enhancement and retardation of twin formation were further correlated...

  • Magnetic and Magnetoelastic Properties of the TbMnSi and Tb0.5La0.5MnSi Compounds. Ivanova, T. I.; Nikitin, S. A.; Maslennikova, M. V.; Umkhaeva, Z. S. // Physics of the Solid State;May2004, Vol. 46 Issue 5, p881 

    X-ray diffraction studies showed substitution of nonmagnetic lanthanum for terbium in the TbMnSi polycrystalline compound to initiate a structural transition from a TiNiSi-type orthorhombic structure (for TbMnSi) to a CeFeSi-type tetragonal phase (for Tb0.5La0.5MnSi). Magnetic measurements (of...

  • On the use of one-dimensional position sensitive detector for x-ray diffraction reciprocal space mapping: Data quality and limitations. Masson, Olivier; Boulle, Alexandre; Guinebretière, René; Lecomte, André; Dauger, Alain // Review of Scientific Instruments;Jun2005, Vol. 76 Issue 6, p063912 

    A homemade x-ray diffractometer using one-dimensional position sensitive detector (PSD) and well suited to the study of thin epitaxial layer systems is presented. It is shown how PSDs can be advantageously used to allow fast reciprocal space mapping, which is especially interesting when...

  • Dimeric ensembles in the crystal structures of mixed-ligand coordination compounds ML( i-Bu2PS2)2 (M = Zn, Cd, Mn, Co, Ni; L = Phen, 2,2'-Bipy). Klevtsova, R. F.; Glinskaya, L. A.; Kokina, T. E.; Larionov, S. V. // Journal of Structural Chemistry;Jul2005, Vol. 46 Issue 4, p699 

    Single crystals of a mononuclear mixed-ligand complex [Mn(Phen)( i-Bu2PS2)2] were grown and used for X-ray diffraction structural study of the material (diffractometer CAD-4, Mo K a -radiation, 1205 F hkl , R = 0.0351). The crystals are monoclinic: a = 15.602(2) �, b = 20.914(3) �, c...

  • Powder diffraction in structural characterization of dienediaminoketones of the indolin-3-one series. Chernyshev, Vladimir; Monakhova, Natalia // Journal of Chemical Sciences;Sep2010, Vol. 122 Issue 5, p721 

    Crystal structures of five derivatives of dienediaminoketones - 3-amino-3-(dimethylamino)-2-[(3-oxo-1,3-dihydro-2H-indol-2-ylidene)methyl]acrylonitrile ( 1); 3-amino-2-[(3-oxo-1,3-dihydro-2Hindol-2-ylidene)methyl]-3-pyperidin-1-ylacrylonitrile ( 2);...

  • Crystal Structure Analysis of Two Terpene Derivatives. Gupta, V. K.; Rajnikant; Parsad, B.; Thappa, R. K.; Agarwal, S. G.; Varghese, B.; Goswami, S. // Crystallography Reports;May2005, Vol. 50 Issue 3, p410 

    The crystal structures of two terpene derivatives, 2,4,5,6,7,7a-hexahydro-7a-hydroxy-3,6-dimethyl-2-benzofuranone (compound I) and β-cyclolavandulic acid (compound II), were determined by single-crystal diffractometry. Compound I,C10H14O3 , crystallizes in the orthorhombic space group P212121...

  • Nontrivial role of the resolution function in the formation of double-crystal X-ray rocking curves. Chuev, M. A.; Pashaev, E. M.; Kvardakov, V. V.; Subbotin, I. A. // Crystallography Reports;Sep2008, Vol. 53 Issue 5, p734 

    A theoretical analysis of the shape of the resolution function of an X-ray diffractometer in the double-crystal nondispersive scheme for measuring rocking curves has been performed. It is shown that this function, along with the strong narrow central line (corresponding to the characteristic...

  • Calculating x-ray diffraction from multilayer lateral crystal structures with arbitrary shapes and composition profiles. Punegov, V. I.; Maksimov, A. I.; Kolosov, S. I.; Pavlov, K. M. // Technical Physics Letters;Feb2007, Vol. 33 Issue 2, p125 

    A theory of x-ray diffraction in the vertical direction from a lateral crystal having an arbitrary shape and arbitrary depth-composition profile has been developed within the framework of the kinematic approximation. The results of a numerical simulation of diffraction patterns from such...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics