Processing route for size distribution narrowing of ion beam synthesized nanoclusters

Yuan, C. W.; Boswell, Cosima N.; Shin, S. J.; Liao, C. Y.; Guzman, J.; Ager, J. W.; Haller, E. E.; Chrzan, D. C.
August 2009
Applied Physics Letters;8/24/2009, Vol. 95 Issue 8, p083120
Academic Journal
Ion beam synthesis of nanocrystals is explored using a recently developed kinetic Monte Carlo model for the process. The model suggests that temperature can be used to engineer nanocrystal size distributions. Specifically, by initiating implants at low temperature and then ramping the temperature upward, one can both tune the average size of the nanocrystals and restrict size distribution widths to less than 20% of the average size.


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