Pull-in/out analysis of nano/microelectromechanical switches with defective oxide layers

Yang Xu; Aluru, N. R.
August 2009
Applied Physics Letters;8/17/2009, Vol. 95 Issue 7, p073112
Academic Journal
We investigate the effect of surface and interior defects such as vacancies and broken bonds on the performance of nano/microelectromechanical (N/MEMS) switches. By combining multiscale electrostatic analysis with mechanical analysis, we compute the capacitance-voltage and pull-in/out voltages of N/MEMS switches in the presence of defects in the dielectric oxide layer. Our results indicate that both surface and interior defects can change the pull-in/out voltages leading to significant voltage offsets. These voltage offsets can lead to an eventual failure of the N/MEMS switch.


Related Articles

  • Optimization of Contact Force and Pull-in Voltage for Series based MEMS Switch. Kshirsagar, Abhijeet; Duttagupta, S. P.; Gangal, S. A. // Sensors & Transducers (1726-5479);Apr2010, Vol. 115 Issue 4, p43 

    Cantilever based metal-to-metal contact type MEMS series switch has many applications namely in RF MEMS, Power MEMS etc. A typical MEMS switch consists of a cantilever as actuating element to make the contact between the two metal terminals of the switch. The cantilever is pulled down by...

  • RF phase shifter using MEMS switches on a tapered coplanar waveguide. Boothalingam, Nataraj; Karantharaj, Porkumaran // Songklanakarin Journal of Science & Technology;Nov-Dec2012, Vol. 34 Issue 6, p645 

    This paper presents the analysis and design of tapered coplanar waveguide based RF phase shifter using MEMS switches for microwave and millimeter-wave applications. The equivalent circuit of the phase shifter has been analyzed with the capacitances of MEMS switches in both up and down states. A...

  • Microelectromechanical System (MEMS) Switches for Radio Frequency Applications - A Review. SHARMA, Ashish Kumar; GUPTA, Navneet // Sensors & Transducers (1726-5479);Jan2013, Vol. 148 Issue 1, p11 

    This review paper described a trend of MEMS switch development towards better performance in actuation voltage, insertion loss, isolation, return loss, switch lifetime, switching speed, and temperature sensitivity for radio frequency applications. Important switch design parameters are discussed...

  • Design and Simulation of a Low Actuation Voltage Capacitive Micro Electro Mechanical Systems' (MEMS) Switch. Soltani, A.; Ghasemi, M.; Mafinezhad, Kh. // Majlesi Journal of Electrical Engineering;Sep2014, Vol. 8 Issue 3, p67 

    In this paper we have proposed a new switch or structure for reducing actuation voltage. This switch is compared with four conventional structures considering the force range of 1uN to 3uN. We have used the ANSYS software for design and simulation for the switch parameters such as actuation...

  • Transition from multiple to single microcontact conduction during hot switching of microelectromechanical switches with ball-shaped dimples. Chow, Linda L. W.; Schrader, Steven A.; Kurabayashi, Katsuo // Applied Physics Letters;9/25/2006, Vol. 89 Issue 13, p133501 

    Previous studies of electron transport within direct contact microelectromechanical switches have found that conduction occurs via nanoscale contact asperities. It has been claimed that reduced contact resistance can be achieved by using multiple contact switches; however, the ability of these...

  • USE ANALOG SWITCHES TO MULTIPLEX YOUR SIGNALS. Rako, Paul // EDN;6/12/2008, Vol. 53 Issue 12, p29 

    The article offers a look at analog switches and multiplexers which are critical components of the signal path. It discusses the importance for electrical designers to understand the applications and specifications of these important analog parts, including power-supply voltage, on-resistance,...

  • Capillary condensation and quantum vacuum effects on the pull-in voltage of electrostatic switches with self-affine rough plates. Palasantzas, George // Journal of Applied Physics;9/1/2006, Vol. 100 Issue 5, p054503 

    In this work, we study the influence of capillary forces in combination with electrostatic and quantum vacuum generated forces on the pull-in voltage of microswitches having self-affine rough surfaces. This type of roughness is described by the rms roughness amplitude w, the in-plane correlation...

  • A torsional sensor for MEMS-based RMS voltage measurements. Dittmer, J.; Judaschke, R.; Buttgenbach, S. // Advances in Radio Science;2008, Vol. 6, p31 

    RF voltage measurement based on electrostatic RMS voltage-to-force conversion is an alternative method in comparison to the conventional thermal power dissipation method. It is based on a mechanical force induced by an RF voltage applied to a micro-mechanical system. For a theoretically adequate...

  • Modeling and Simulation of MEMS Horizontal Thermal Actuator with Coventor Design Environment. Yanchev, Viktor Vasilev; Manolov, Emil Dimitrov; Hristov, Marin Hristov; Grozdanov, Vladimir Emilov; Radonov, Rossen Ivanov // Annual Journal of Electronics;2011, Vol. 5 Issue 2, p124 

    MEMS motion and actuation, traditionally has been achieved, using electrostatical comb-drive or parallel plate actuation techniques. While successful, this actuation method typically provides a small force per unit area and requires a high actuation voltage. Surface micro machined...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics