TITLE

The use of 'mixed' beams in microprobe imaging

AUTHOR(S)
Saint, A.; Breese, M.B.H.; Legge, G.J.F.
PUB. DATE
August 1996
SOURCE
Review of Scientific Instruments;Aug1996, Vol. 67 Issue 8, p2940
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the production and application of mixed beams for a magnetically focused nuclear microprobe. Description of a mixed beam; Presentation of two techniques for the production of such beams; Focus on the application of mixed beams to ion beam induced charge, scanning transmission ion microscopy and ion microlithography.
ACCESSION #
4376486

 

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