TITLE

Imaging ellipsometry revisited: Developments for visualization of thin transparent layer on

AUTHOR(S)
Jin, Gang; Janson, Roger; Arwin, Hans
PUB. DATE
August 1996
SOURCE
Review of Scientific Instruments;Aug1996, Vol. 67 Issue 8, p2930
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents an imaging ellipsometry as a technique for quantification and visualization of the lateral thickness distribution of thin transparent layers on solid silicon substrates. Advantage of imaging ellipsometry; Performance of thickness measurements for calibration purposes with ordinary null ellipsometry; Applications of ellipsometry.
ACCESSION #
4376484

 

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