TITLE

Electron energy distribution function measurements in a planar inductive oxygen radio frequency

AUTHOR(S)
Barnes, Michael S.; Forster, John C.; Keller, John H.
PUB. DATE
May 1993
SOURCE
Applied Physics Letters;5/24/1993, Vol. 62 Issue 21, p2622
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the planar oxygen glow discharge as a function of pressure using Langmuir probe. Use of Langmuir probes to measure electron energy distribution functions (EEDF); Consideration of glow discharge plasmas for semiconductor manufacturing; Plot of EEDF for oxygen discharges.
ACCESSION #
4375164

 

Related Articles

  • Breakdown of Highly Excited Oxygen in a DC Electric Field. Vagin, N. P.; Deryugin, A. A.; Ionin, A. A.; Klimachev, Yu. M.; Kochetov, I. V.; Napartovich, A. P.; Sinitsin, D. V.; Yuryshev, N. N. // Plasma Physics Reports;Mar2000, Vol. 26 Issue 3, p278 

    The breakdown of oxygen in a dc electric field is studied. A high concentration of oxygen molecules in the a[sup 1]?[sub g] excited state is obtained in a purely chemical reactor. A decrease in the breakdown voltage at degrees of excitation exceeding 50% is observed. The theoretical decrement in...

  • Nonlocal Nature of the Electron Energy Spectrum in a Glow-Discharge in Pure O[sub 2]: II. Actinometry of O([sup 3]P) Atoms in a Plasma at Low Gas Pressures. Ivanov, V. V.; Klopovskii, K. S.; Lopaev, D. V.; Rakhimov, A. T.; Rakhimova, T. V. // Plasma Physics Reports;Nov2000, Vol. 26 Issue 11, p980 

    Results are presented from measurements of the density of oxygen atoms in the positive column of a dc discharge in pure oxygen by the actinometric technique using Ar atoms. Based on the excitation rate constants calculated using two different approaches (namely, the two-term approximation and...

  • Investigation of the Mechanism for Rapid Heating of Nitrogen and Air in Gas Discharges. Popov, N. A. // Plasma Physics Reports;Oct2001, Vol. 27 Issue 10, p886 

    A rapid heating of nitrogen�oxygen mixtures excited by gas discharges is investigated numerically with allowance for the following main processes: the reactions of predissociation of highly excited electronic states of oxygen molecules (which are populated via electron impact or via the...

  • Scaling Laws for the Spatial Distributions of the Plasma Parameters in the Positive Column of a DC Oxygen Discharge. Bogdanov, E.A.; Kudryavtsev, A.A.; Tsendin, L.D.; Arslanbekov, R.R.; Kolobov, V.I.; Kudryavtsev, V.V. // Technical Physics;Sep2003, Vol. 48 Issue 9, p1151 

    Comprehensive self-consistent simulations of the positive column plasma of a dc oxygen discharge are performed with the help of commercial CFDRC software (http://www.cfdrc.com/~cfdplasma), which enables one to carry out computations in an arbitrary 3D geometry using fluid equations for heavy...

  • STUDIES ON ATMOSPHERIC PRESSURE GLOW DISCHARGE OF HELIUM-OXYGEN PLASMA TREATMENT ON POLYESTER/COTTON BLENDED FABRIC. Kale, Kiran; Palaskar, Shital; Hauser, Peter J.; El-Shafei, A. // BTRA Scan;Mar2012, Vol. 42 Issue 1, p1 

    The article discusses a study on the use of atmospheric pressure glow discharge (APGD) plasma generated from helium and oxygen to improve the hydrophilic properties of polyester/cotton (P/C) blended fabric. It describes the influence of plasma treatment process parameters on the treated fabric's...

  • Two-photon laser induced fluorescence and amplified spontaneous emission atom concentration measurements in O2 and H2 discharges. Amorim, J.; Baravian, G.; Touzeau, M.; Jolly, J. // Journal of Applied Physics;8/1/1994, Vol. 76 Issue 3, p1487 

    Focuses on a study which utilized multiphoton laser-induced fluorescence (LIF) and amplified spontaneous emission (ASE) to detect ground-state atoms in oxygen and hydrogen glow discharge plasmas. Information on LIF and ASE; Methodology of the study; Results and discussion.

  • Chemical oxygen-iodine laser with external production of iodine atoms in CHI/Ar dc glow discharge. Mikheyev, P. A.; Zagidullin, M. V.; Azyazov, V. N. // Applied Physics B: Lasers & Optics;Oct2010, Vol. 101 Issue 1/2, p7 

    cw chemical oxygen-iodine laser (COIL) operating in a subsonic mode with a high water content of ∼15% and external production of iodine atoms in CHI/Ar dc glow discharge has been demonstrated. A straightforward comparison of COIL performance for two cases-conventional, when I was injected...

  • Glow Discharge in Singlet Oxygen. Vagin, N. P.; Ionin, A. A.; Klimachev, Yu. M.; Kochetov, I. V.; Napartovich, A. P.; Sinitsyn, D. V.; Yuryshev, N. N. // Plasma Physics Reports;Mar2003, Vol. 29 Issue 3, p211 

    Currently, there is no experimental data on the plasma balance in gas mixtures with a high content of singlet delta oxygen O[sub 2](¹δ[sub g]). These data can be obtained by studying the parameters of an electric discharge in singlet oxygen produced by a chemical generator. The O[sub...

  • Optical Emission and Raman Spectroscopy Studies of Reactivity of Low-Pressure Glow Discharges in Ar–O2 and He–O2 Gas Mixtures with Coked Catalysts. Al-Jalal, Abdulaziz M.; Khan, Mohammad Aslam // Plasma Chemistry & Plasma Processing;Feb2010, Vol. 30 Issue 1, p173 

    We demonstrate that low-pressure glow discharges in He–O2 gas mixture are effective in removing carbonaceous surface layers from coked catalysts. These discharges contain a number of reactive species including O, O3, and O2*, and all these could contribute in the decoking process....

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics