TITLE

Negative-ion sources for modification of materials (invited)

AUTHOR(S)
Ishikawa, Junzo
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1410
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the development of negative-ion sources for modification materials. Charging-free negative-ion implantation; Relationships among the internal potential and kinetic energies of ion and atomic-bonding state in negative- and positive-ion beam depositions; Conditions for negative ion sources for ion implantation.
ACCESSION #
4367333

 

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