TITLE

Production of very low energy and high brightness ion beam

AUTHOR(S)
Yoshikawa, Takafumi; Nakamura, Shin; Ueda, Yoshio; Goto, Seiichi
PUB. DATE
March 1996
SOURCE
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1393
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the production of high brightness ion beams at energies below 100 eV. Effects of high deceleration voltage in a triode extraction system and plasma potential; Increase in beam brightness by the reduction of plasma sheath potential of the source plasma; Maximum current density at the beam center.
ACCESSION #
4367329

 

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