The production of ions of solids from the PIG source with an additional anode

Bogomolov, S.L.; Kutner, V.B.; Tretyakov, Yu.P.
March 1996
Review of Scientific Instruments;Mar96, Vol. 67 Issue 3, p1381
Academic Journal
Discusses the production of ions of solids from the PIG ion source with an additional anode and solid material feed by cathode sputtering. Conventional disposition of sputtering electrode; Influence of the plasma particles drift motion on the sputtering electrode; Disposition of the sputtering electrode.


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